8/5/2010	12:08:45 AM	H2 valve closed
8/5/2010	12:08:45 AM	BCl3 valve closed
8/5/2010	12:08:45 AM	PH3 valve closed
8/5/2010	12:08:45 AM	SiCl4 pre valve closed
8/5/2010	12:08:45 AM	SiCl4 post valve closed
8/5/2010	12:08:45 AM	Main Vac valve closed
8/5/2010	12:08:45 AM	Bypass valve closed
8/5/2010	12:08:45 AM	Helium valve opened
8/5/2010	12:08:45 AM	Bubbler valve opened
8/5/2010	12:08:45 AM	Helium MFC set to  500.000000
8/5/2010	12:08:45 AM	H2 MFC set to  0.000000
8/5/2010	12:08:45 AM	BCl3 MFC set to  0.000000
8/5/2010	12:08:45 AM	PHl3 MFC set to  0.000000
8/5/2010	12:08:45 AM	SiCl4 MFC set to  0.000000
8/5/2010	12:08:45 AM	Bypass solenoid MFC set to  0.000000
8/5/2010	12:08:45 AM	Tube furnace set to 0
8/5/2010	12:28:45 AM	Helium valve closed
8/5/2010	12:28:45 AM	H2 valve closed
8/5/2010	12:28:45 AM	BCl3 valve closed
8/5/2010	12:28:45 AM	PH3 valve closed
8/5/2010	12:28:45 AM	SiCl4 pre valve closed
8/5/2010	12:28:45 AM	SiCl4 post valve closed
8/5/2010	12:28:45 AM	Main Vac valve closed
8/5/2010	12:28:45 AM	Bypass valve closed
8/5/2010	12:28:45 AM	Bubbler valve closed
8/5/2010	12:28:45 AM	Helium MFC set to  0.000000
8/5/2010	12:28:45 AM	H2 MFC set to  0.000000
8/5/2010	12:28:45 AM	BCl3 MFC set to  0.000000
8/5/2010	12:28:45 AM	PHl3 MFC set to  0.000000
8/5/2010	12:28:45 AM	SiCl4 MFC set to  0.000000
8/5/2010	12:28:45 AM	Bypass solenoid MFC set to  0.000000
8/5/2010	12:28:45 AM	Tube furnace set to 0
8/5/2010	12:28:45 AM	Run finished at 12:28 AM
8/5/2010	12:38:07 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/5/2010	12:38:07 AM	Recipe started at 12:38 AM
8/5/2010	12:38:07 AM	Helium valve closed
8/5/2010	12:38:07 AM	H2 valve closed
8/5/2010	12:38:07 AM	BCl3 valve closed
8/5/2010	12:38:07 AM	PH3 valve closed
8/5/2010	12:38:07 AM	SiCl4 pre valve closed
8/5/2010	12:38:07 AM	SiCl4 post valve closed
8/5/2010	12:38:07 AM	Main Vac valve closed
8/5/2010	12:38:07 AM	Bubbler valve closed
8/5/2010	12:38:07 AM	Bypass valve opened
8/5/2010	12:38:07 AM	Helium MFC set to  0.000000
8/5/2010	12:38:07 AM	H2 MFC set to  0.000000
8/5/2010	12:38:07 AM	BCl3 MFC set to  0.000000
8/5/2010	12:38:07 AM	PHl3 MFC set to  0.000000
8/5/2010	12:38:07 AM	SiCl4 MFC set to  0.000000
8/5/2010	12:38:07 AM	Bypass solenoid MFC set to  0.000000
8/5/2010	12:38:08 AM	Tube furnace set to 0
8/5/2010	12:38:44 AM	Helium valve closed
8/5/2010	12:38:44 AM	H2 valve closed
8/5/2010	12:38:44 AM	BCl3 valve closed
8/5/2010	12:38:44 AM	PH3 valve closed
8/5/2010	12:38:44 AM	SiCl4 pre valve closed
8/5/2010	12:38:44 AM	SiCl4 post valve closed
8/5/2010	12:38:44 AM	Bubbler valve closed
8/5/2010	12:38:44 AM	Main Vac valve opened
8/5/2010	12:38:44 AM	Bypass valve opened
8/5/2010	12:38:44 AM	Helium MFC set to  0.000000
8/5/2010	12:38:44 AM	H2 MFC set to  0.000000
8/5/2010	12:38:44 AM	BCl3 MFC set to  0.000000
8/5/2010	12:38:44 AM	PHl3 MFC set to  0.000000
8/5/2010	12:38:44 AM	SiCl4 MFC set to  0.000000
8/5/2010	12:38:44 AM	Bypass solenoid MFC set to  0.000000
8/5/2010	12:38:44 AM	Tube furnace set to 0
8/5/2010	12:38:45 AM	Run finished at 12:38 AM
8/5/2010	12:38:45 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
